Tetrakis(diethylamino)zirconium T9982
In stock
SKU
T9982
Tetrakis(diethylamino)zirconium, 13801-49-5, [(C2H5)2N]4Zr, MW 379.74 is a liquid with a density of 1.026 g/mL. Tetrakis(diethylamino)zirconium has a boiling point of 128 °C and a flash point of 12 °C in a clo
Description | In the deposition of thin film ferroelectric materials by CVD, Tetrakis (diethylamino) zirconium is an effective precursor compound. As a precursor, it is also useful in the deposition of ZrN films using remote plasma-enhanced atomic layer deposition (ALD) method. In addition, it is useful in the production of olefin polymers. |
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Chemical Synonym | Zirconium Diethylamide |
SKU | T9982 |
Appearance/Form | Liquid |
CAS No. | 13801-49-5 |
Formula | [(C 2 H 5 ) 2 N] 4 Zr |
Handling and Storage | Precautions for safe handling Open and handle receptacle with care. Information about protection against explosions and fires: Keep ignition sources away - Do not smoke. Protect against electrostatic charges. Conditions for safe storage, including any incompatibilities Keep cool. Requirements to be met by storerooms and receptacles Store in a cool location. |
Molecular Weight | 379.74 |
Storage | Keep container tightly closed in a dry and well-ventilated place. |
Transport Information | DOT (US) UN number: 3399 Class: 4.3, (3) Packing group: II Proper shipping name: ORGANOMETALLIC SUBSTANCE, LIQUID, WATER-REACTIVE,FLAMMABLE IMDG UN number: 3399 Class: 4.3, (3) Packing group: II Proper shipping name: ORGANOMETALLIC SUBSTANCE, LIQUID, WATER-REACTIVE,FLAMMABLE IATA UN number: 3399 Class: 4.3, (3) Packing group: II Proper shipping name: ORGANOMETALLIC SUBSTANCE, LIQUID, WATER-REACTIVE,FLAMMABLE |