Tantalum Ethoxide

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SKU
TC1002
Tantalum Ethoxide

CAS NO: 6074-84-6

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Description
Used in semiconductor coatings, oxide films, and thin film optical applications, Tantalum ethoxide precursor is used to deposit ultra-thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition (ALD) and chemical vapor deposition (CVD) methods

Chemical Synonym Tantalum (V) Ethoxide, Pentaethyl tantalate, Tantalum pentaethoxide
SKU TC1002
Appearance/Form Clear, colorless liquid
CAS No. 6074-84-6
Purity 99.99% Clear Colorless to Pale Yellow Liquid
Density 1.566 g/mL
Flash Point 30 °C (86 °F) in a closed cup
Formula Ta(OC2H5)5
Handling and Storage Precautions for safe handling

Moisture Sensitive, Packed under Argon or Nitrogen.

Avoid inhalation of vapor or mist.
Keep away from sources of ignition - No smoking. Take measures to prevent the buildup of electrostatic charge. For precautions see section 2.2.

Conditions for safe storage, including any incompatibilities
Keep container tightly closed in a dry and well-ventilated place. Containers which are opened must be carefully resealed and kept upright to prevent leakage.

Moisture sensitive. Handle and store under inert gas.
Molecular Weight 406.25
MP 21 °C (70 °F)
Storage Keep container tightly closed in a dry and well-ventilated place.
Transport Information Proper Shipping Name: Corrosive liquids, flammable, n.o.s. (Tantalum Ethoxide)
UN2920
Class: 8 (3)
Hazard Label: Corrosive Liquid
Packing Group: II
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