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CAS NO: 14986-21-1

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  Product Name SKU Grade Quantity List Price
Hexachlorodisiloxane 1104P-Bulk practical BULK Price on Request
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Description City Chemical manufactures high purity Hexachlorodisiloxane, CAS 14986-21-1 in bulk quantity. Hexachlorodisiloxane Cl6OSi2 is predominantly used in proteomic research. Through chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes, Hexachlorodisiloxane is used as a precursor for low temperature deposition of thin layers of SiN, epitaxial Si and SiON used in semiconductor manufacturing.

Hexachlorodisiloxane is used to produce amorphous silicon thin films. HCDS can be utilized as a chemical diffusion barrier to create gate spacers for dynamic random-access memory (DRAM) devices.

SKU 1104P
Appearance/Form Clear liquid
CAS No. 14986-21-1
Property 1 practical
Formula Cl3SiOSiCl3
Molecular Weight 284.89
Storage Keep container tightly closed in a dry and well-ventilated place.
Transport Information UN number 2987, Class 8, PG II

Request for an SDS (Saftey Data Sheet) and a COA (Certificate of Analysis)

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