HCDS is used to grow thin films of Si, SiO2, SiC, Si3N4 by chemical vapor deposition. The advantage to using HCDS is that it can be used at low temperatures; powerful deoxygenating agent; reducing agent; fiber optics, solar energy products; aiding ALD process.
HCDS is predominantly used in semiconductor and solar manufacturing industries. Through chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes, HCDS is used as a precursor for low temperature deposition of thin layers of SiN, epitaxial Si and SiON used in semiconductor manufacturing.
HCDS is used to produce amorphous silicon thin films. HCDS can be utilized as a chemical diffusion barrier to create gate spacers for dynamic random access memory (DRAM) devices.
Sometimes used in the pharmaceutical industry, for the reduction of phosphine oxides.
|Chemical Synonym||Disilicon hexachloride, HCDS|
|Appearance/Form||Clear, colorless Liquid|
|BP||144 - 145.5 °C|
|Density||1.562 g/mL at 25 °C (77 °F)|
|Formula||Cl 6 Si 2|
|Handling and Storage||Precautions for safe handling
Moisture sensitive. Must be handled in an inert environment (Argon or Nitrogen). Avoid inhalation of vapor or mist.
Handle and store under inert gas. Stable, but reacts violently with water. May be shock sensitive. Incompatible with water, moisture, acids, strong bases, oxidizing agents, and alcohols
Conditions for safe storage, including any incompatibilities
Keep container tightly closed in a dry and well-ventilated place. Containers which are opened must be carefully resealed and kept upright to prevent leakage. Never allow product to get in contact with water during storage.
|Storage||Keep container tightly closed in a dry and well-ventilated place.|
|Transport Information||DOT (US)
UN number: 2987 Class: 8 Packing group: II
Proper shipping name: Chlorosilanes, corrosive, n.o.s
Reportable Quanity (RQ):
Marine pollutant: No
Poison Inhalation Hazard: No
UN number: 2987 Class: 8 Packing group: II EMS-No: F-A, S-B Proper shipping name: CHLOROSILANES, CORROSIVE, N.O.S.
Marine pollutant: No
UN number: 2987 Class: 8 Packing group: II Proper shipping name: Chlorosilanes, corrosive, n.o.s.
IATA Passenger: Not permitted for transport
|Vapor Pressure||12 mm Hg at 40 °C|