Diethylsilane
CAS No.: 542-91-6
Diethylsilane, 542-91-6, C4HIOSi, MW 88.22, is a clear colorless liquid, boiling point 56 °C. Diethylsilane has a purity of 99+%. Diethylsilane is used to grow thin films SiO2, SiC by CVD, ALD.
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CAS No. 542-91-6 Appearance/Form Clear, colorless liquid Formula C 4 HIOSi Molecular Weight 88.2 BP 56 °C Flash Point -20 °C in a closed cup Density 0.686 g/mL Refractive Index 1.392 Unit Sizes Bulk Purity 99+% Storage Keep in a cool, dry, well-ventilated place. Keep away from heat, sparks, and open flame Special Requirements Handle and store under inert gas. Stable, but reacts violently with water. Moisture sensitive. May be shock sensitive. Incompatible with water, moisture, acids, strong bases, oxidizing agents, and alcohols Uses To grow thin films SiO2, SiC by CVD, ALD Transport Information Proper Shipping Name: Flammable liquids, n.o.s.
UN1993
Class: 3
Hazard Label: Flammable liquid
Packing Group: II
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