CAS No. | 542-91-6 |
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Appearance/Form | Clear, colorless liquid |
Formula | C 4 HIOSi |
Molecular Weight | 88.2 |
BP | 56 °C |
Flash Point | -20 °C in a closed cup |
Density | 0.686 g/mL |
Refractive Index | 1.392 |
Unit Sizes | Bulk |
Purity | 99+% |
Storage | Keep in a cool, dry, well-ventilated place. Keep away from heat, sparks, and open flame |
Special Requirements | Handle and store under inert gas. Stable, but reacts violently with water. Moisture sensitive. May be shock sensitive. Incompatible with water, moisture, acids, strong bases, oxidizing agents, and alcohols |
Uses | To grow thin films SiO2, SiC by CVD, ALD |
Transport Information | Proper Shipping Name: Flammable liquids, n.o.s. UN1993 Class: 3 Hazard Label: Flammable liquid Packing Group: II |