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CAS No.: 542-91-6

Diethylsilane, 542-91-6, C4HIOSi, MW 88.22, is a clear colorless liquid, boiling point 56 °C. Diethylsilane has a purity of 99+%. Diethylsilane is used to grow thin films SiO2, SiC by CVD, ALD.
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CAS No.542-91-6
Appearance/FormClear, colorless liquid
FormulaC 4 HIOSi
Molecular Weight88.2
BP56 °C
Flash Point-20 °C in a closed cup
Density0.686 g/mL
Refractive Index1.392
Unit SizesBulk
StorageKeep in a cool, dry, well-ventilated place. Keep away from heat, sparks, and open flame
Special RequirementsHandle and store under inert gas. Stable, but reacts violently with water. Moisture sensitive. May be shock sensitive. Incompatible with water, moisture, acids, strong bases, oxidizing agents, and alcohols
UsesTo grow thin films SiO2, SiC by CVD, ALD
Transport InformationProper Shipping Name: Flammable liquids, n.o.s.


Class: 3

Hazard Label: Flammable liquid

Packing Group: II