Hexachlorodisilane

Purchase Hexachlorodisilane Now

Hexachlorodisilane, 13465-77-5, Cl₆Si₂, MW 268.89, is a clear colorless liquid. Hexachlorodisilane, known as HCDS is stable but reacts violently with water. Hexachlorodisilane is used in the semiconductor industry for manufacturing flash memory chips. Wafer think layers are achieved by chemical vapor deposition of HCDS.

General Information on Hexachlorodisilane

Item No.: H303-Bulk

CAS No. : 13465-77-5

Synonym : HCDS

Properties of Hexachlorodisilane:

Appearance/Form: Clear, colorless Liquid

Formula: Cl₆Si₂

Molecular Weight: 268.89

BP: 144 – 145.5 °C

MP: -1 °C

Density: 1.562 g/mL at 25 °C (77 °F)

Refractive Index: 1.475

Stock Status : Readily Available

Purity : 99.99+% (trace metal analysis upon request)

Storage : Keep tightly closed in a dry, well-ventilated place.

Special Requirements : Handle and store under inert gas. Stable, but reacts violently with water. Moisture sensitive. May be shock sensitive. Incompatible with water, moisture, acids, strong bases, oxidizing agents, and alcohols

Uses of Hexachlorodisilane

HCDS is used to grow thin films of Si, SiO₂, SiC by chemical vapor deposition. HCDS can be used at relatively low temperatures

Transport Information for Hexachlorodisilane

Proper Shipping Name: Chlorosilanes, Corrosive, n.o.s. (Hexachlorodisilane)

UN2987

Class: 8

Hazard Label: Corrosive

Packing Group: II

Purchase Hexachlorodisilane Now