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Hexachlorodisilane

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Hexachlorodisilane
Hexachlorodisilane, Cas #13465-77-5, Cl6Si2, molecular weight 268.89. Hexachlorodisilane is a clear colorless, corrosive liquid, known as HCDS, which is stable but reacts violently with water. HCDS is used as a spacer in litho for double, triple, and quadruple pattering (pitch doubling etc.). Also used as a sidewall spacer in advanced logic transistors- planar structures. Used as representative material for all advanced spacers (amino silane types- LTO and SAM)

Hexachlorodisilane is also used in the semiconductor industry for manufacturing fiber optics and solar energy products. HCDS is also used as a reducing reagent and is the most powerful deoxygenating agent. ALD and CVD methods help develop Silicon Nitride and Silicon Dioxide. Hexachlorodisilane is a chemical used in the ALD process which will help increase the production of Silicon Nitride and Silicon Dioxide.
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Additional Information

Additional Information

SKUH303-BULK
CAS No.13465-77-5
SynonymHCDS
Appearance/FormClear, colorless Liquid
FormulaCl 6 Si 2
Molecular Weight268.89
MP -1 °C
BP144 - 145.5 °C
Density1.562 g/mL at 25 °C (77 °F)
Vapor Pressure12 mm Hg at 40 °C
Unit SizesBulk
Purity99.99+% (trace metal analysis upon request)
StorageKeep tightly closed in a cool, dry, well-ventilated place. Handle and store under inert gas. Special Notes: Stable, but reacts violently with water. Moisture and shock sensitive. Incompatible with water, moisture, acids, strong bases, oxidizing agents, an
Special RequirementsHandle and store under inert gas. Stable, but reacts violently with water. Moisture sensitive. May be shock sensitive. Incompatible with water, moisture, acids, strong bases, oxidizing agents, and alcohols
UsesHCDS is used to grow thin films of Si, SiO 2, SiC by chemical vapor deposition. HCDS can be used at relatively low temperatures; powerful deoxygenating agent; reducing agent; fiber optics, solar energy products; aiding ALD process.
Transport InformationProper Shipping Name: Chlorosilanes, Corrosive, n.o.s. (Hexachlorodisilane)

UN2987

Class: 8

Hazard Label: Corrosive

Packing Group: II
Call For PriceYes
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Hexachlorodisilane, Cas #13465-77-5, Cl6Si2, molecular weight 268.89. Hexachlorodisilane is a clear colorless, corrosive liquid, known as HCDS, which is stable but reacts violently with water. HCDS is used as a spacer in litho for double, triple, and quadruple pattering (pitch doubling etc.). Also used as a sidewall spacer in advanced logic transistors- planar structures. Used as representative material for all advanced spacers (amino silane types- LTO and SAM)

Hexachlorodisilane is also used in the semiconductor industry for manufacturing fiber optics and solar energy products. HCDS is also used as a reducing reagent and is the most powerful deoxygenating agent. ALD and CVD methods help develop Silicon Nitride and Silicon Dioxide. Hexachlorodisilane is a chemical used in the ALD process which will help increase the production of Silicon Nitride and Silicon Dioxide.