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Hexachlorodisilane
CAS No.: 13465-77-5
Hexachlorodisilane
OR
Product Information

Additional Information

CAS No.13465-77-5
Chemical SynonymHCDS
Appearance/FormClear, colorless Liquid
FormulaCl 6 Si 2
Molecular Weight268.89
MP -1 °C
BP144 - 145.5 °C
Density1.562 g/mL at 25 °C (77 °F)
Vapor Pressure12 mm Hg at 40 °C
Unit SizesBulk
Purity99.99+% (trace metal analysis upon request)
StorageKeep tightly closed in a cool, dry, well-ventilated place. Handle and store under inert gas. Special Notes: Stable, but reacts violently with water. Moisture and shock sensitive. Incompatible with water, moisture, acids, strong bases, oxidizing agents, an
Special RequirementsHandle and store under inert gas. Stable, but reacts violently with water. Moisture sensitive. May be shock sensitive. Incompatible with water, moisture, acids, strong bases, oxidizing agents, and alcohols
UsesHCDS is used to grow thin films of Si, SiO 2, SiC by chemical vapor deposition. HCDS can be used at relatively low temperatures; powerful deoxygenating agent; reducing agent; fiber optics, solar energy products; aiding ALD process.
Transport InformationProper Shipping Name: Chlorosilanes, Corrosive, n.o.s. (Hexachlorodisilane)

UN2987

Class: 8

Hazard Label: Corrosive

Packing Group: II
Safety and Hazards Information

Classification of the substance or mixture

GHS Classification in accordance with 29 CFR 1910 (OSHA HCS)

Acute toxicity, Oral (Category 3), H301 Acute toxicity, Inhalation (Category 3), H331 Acute toxicity, Dermal (Category 3), H311 Serious eye damage (Category 1), H318 For the full text of the H-Statements mentioned in this Section, see Section 16.

Classification of the substance or mixture GHS Classification in accordance with 29 CFR 1910 (OSHA HCS) Skin corrosion (Category 1B), H314 Serious eye damage (Category 1), H318 For the full text of the H-Statements mentioned in this Section, see Section 16. 2.2

GHS Label elements, including precautionary statements

Pictogram

Signal word Danger

Hazard statement(s) H314 Causes severe skin burns and eye damage. Precautionary statement(s) P264 Wash skin thoroughly after handling. P280 Wear protective gloves/ protective clothing/ eye protection/ face protection. P301 + P330 + P331 IF SWALLOWED: rinse mouth. Do NOT induce vomiting.

P303 + P361 + P353 IF ON SKIN (or hair): Remove/ Take off immediately all contaminated clothing. Rinse skin with water/ shower.

P304 + P340 IF INHALED: Remove victim to fresh air and keep at rest in a position comfortable for breathing.

P305 + P351 + P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing.

P310 Immediately call a POISON CENTER or doctor/ physician. P321 Specific treatment (see supplemental first aid instructions on this label).

P363 Wash contaminated clothing before reuse. P405 Store locked up.

P501 Dispose of contents/ container to an approved waste disposal plant. Hazards not otherwise classified (HNOC) or not covered by GHS Reacts violently with water. Reacts violently with water.

Handling and Storage

Precautions for safe handling

For precautions see

Conditions for safe storag including any incompatibilities

Keep container tightly closed in a dry and well-ventilated place. Containers which are opened must be carefully resealed and kept upright to prevent leakage. Never allow product to get in contact with water during storage. Handle and store under inert gas.