Hexachlorodisilane, Cas #13465-77-5, Cl6Si2, molecular weight 268.89. Hexachlorodisilane is a clear coloress, corrosive liquid, known as HCDS. HCDS is used as a spacer in litho for double, triple, and quadruple pattering (pitch doubling etc.). Also used as a sidewall spacer in advanced logic transistors- planar structures. Used as representative material for all advanced spacers (amino silane types- LTO and SAM)
Hexachlorodisilane is also used in the semiconductor industry for manufacturing fiber optics and solar energu products. HCDS is also used as a reducing reagent and is the most powerful deoxygenating agent. ALD and CVD methods help develop Silicon Nitride and Silicon Dioxide. Hexachlorodisilane is a chemical used in the ALD process which will help increase the production of Silicon Nitride and Silicon Dioxide.
General Information on Hexachlorodisilane
CAS No. : 13465-77-5
Synonym : HCDS
Properties of Hexachlorodisilane
Appearance/Form: Clear, colorless Liquid
Molecular Weight: 268.89
BP: 144 - 145.5 °C
MP: -1 °C
Density: 1.562 g/mL at 25 °C (77 °F)
Vapor Pressure: 12 mm Hg at 40 °C
Stock Status : Readily Available
Purity : 99.99+% (trace metal analysis upon request)
Storage: Keep tightly closed in a cool, dry, well-ventilated place. Handle and store under inert gas. Special Notes: Stable, but reacts violently with water. Moisture and shock sensitive. Incompatible with water, moisture, acids, strong bases, oxidizing agents, and alcohols.
Special Requirements: Handle and store under inert gas. Stable, but reacts violently with water. Moisture sensitive. May be shock sensitive. Incompatible with water, moisture, acids, strong bases, oxidizing agents, and alcohols
Uses of Hexachlorodisilane
HCDS is used to grow thin films of Si, SiO2, SiC by chemical vapor deposition. HCDS can be used at relatively low temperatures; powerful deoxygenating agent; reducing agent; fiber optics, solar energy products; aiding ALD process.
Transport Information for Hexachlorodisilane
Proper Shipping Name: Chlorosilanes, Corrosive, n.o.s. (Hexachlorodisilane)
Hazard Label: Corrosive
Packing Group: II
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